[18p-A18-1~15] 3.15 Silicon photonics

[18p-A18-10] MOS Capacitor Type Si Optical Modulator Integrated with Ge Photodetector, and its High Speed Operation with CMOS Driver

^○Junichi Fujikata¹, Shigeki Takahashi¹, Masashi Takahashi², Masataka Noguchi¹, Hidemi Noguchi³, Mitsuru Kurihara¹, Tsuyoshi Horikawa², Takahiro Nakamura¹, Yasuhiko Arakawa⁴ (PETRA¹, AIST², NEC³, Univ. of Tokyo⁴)

Keywords:シリコン光変調器,ゲルマニウム受光器,シリコンフォトニクス集積回路