The 75th JSAP Autumn Meeting, 2014

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Oral presentation

03. Optics and Photonics » 3.15 Silicon photonics

[18p-A18-1~15] 3.15 Silicon photonics

Thu. Sep 18, 2014 1:15 PM - 5:15 PM A18 (E310)

3:00 PM - 3:15 PM

[18p-A18-8] Silicon optical modulator fabricated by using immersion ArF lithography

Suguru Akiyama1, Takeshi Baba1, Masahiko Imai1, Masahiko Mori1, ○Tatsuya Usuki1 (PETRA1)

Keywords:シリコンフォトニクス,光変調器