[18p-A19-1~14] 13.3 Si Process・Interconnect・MEMS・Integration

△ [18p-A19-12] Mesh-like silicon tactile imager with integrated thermal conductivity sensor for realization of material discrimination

^○Ryota Osugi¹, Yusuke Takagi¹, Yusaku Maeda¹, Kyohei Terao¹, Takaaki Suzuki¹, Husao Shimokawa¹, Hidekuni Takao¹ (Kagawa University¹)

Keywords:触覚センサ,熱伝導率