[18p-A19-1~14] 13.3 Si Process・Interconnect・MEMS・Integration

[18p-A19-6] Self-oscillation system with thin-film PZT MEMS bimorph cantilevers

^○(M2)Junichi Inoue¹, Takafumi Matsuda¹, Kensuke Kanda¹, Takayuki Fujita¹, Kazusuke Maenaka¹ (Univ.Hyogo¹)

Keywords:PZT,MEMS,Bimorph