The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18p-A19-1~14] 13.3 Si Process・Interconnect・MEMS・Integration

Thu. Sep 18, 2014 2:00 PM - 5:45 PM A19 (E311)

3:15 PM - 3:30 PM

[18p-A19-6] Self-oscillation system with thin-film PZT MEMS bimorph cantilevers

○(M2)Junichi Inoue1, Takafumi Matsuda1, Kensuke Kanda1, Takayuki Fujita1, Kazusuke Maenaka1 (Univ.Hyogo1)

Keywords:PZT,MEMS,Bimorph