3:15 PM - 3:30 PM
[18p-A19-6] Self-oscillation system with thin-film PZT MEMS bimorph cantilevers
Keywords:PZT,MEMS,Bimorph
Presentation information
Oral presentation
13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration
[18p-A19-1~14] 13.3 Si Process・Interconnect・MEMS・Integration
Thu. Sep 18, 2014 2:00 PM - 5:45 PM A19 (E311)