The 75th JSAP Autumn Meeting, 2014

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Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18p-A19-1~14] 13.3 Si Process・Interconnect・MEMS・Integration

Thu. Sep 18, 2014 2:00 PM - 5:45 PM A19 (E311)

3:30 PM - 3:45 PM

[18p-A19-7] PZT thin film deposition on a Si 3D substrate

○(M1)Shingo Moriue1, Junichi Inoue1, Kensuke Kanda1, Takayuki Fujita1, Kazusuke Maenaka1 (Univ.of.Hyogo1)

Keywords:MEMS,PZT