Investigation of Fe atom diffusion in Ga<sub>2</sub>O<sub>3</sub>

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology

Thu. Sep 18, 2014 2:00 PM - 6:00 PM A22 (E314)

5:15 PM - 5:30 PM

^○Kohei Sasaki^1,2, Man Hoi Wong², Masataka Higashiwaki², Akito Kuramata¹, Shigenobu Yamakoshi¹ (Tamura Corp.¹, NICT²)

Keywords:Ga2O3,酸化ガリウム,拡散