[18p-A27-1~17] 14.2 Ultrathin films and quantum nanostructures

[18p-A27-8] Optical response of InGaAs Quantum Nanodisks by Bio-template and Neutral Beam Etching

^○Akio Higo¹, Takayaki Kiba^2,7, Cedric Thomas^3,7, Chang-Yong Lee^3,7, Kenichi Yoshikawa³, Yosuke Tamura³, Ichiro Yamashita⁴, Yunpeng Wang⁵, Sodabunlu Hassanet⁵, Masakazu Sugiyama⁶, Yoshiaki Nakano⁶, Akihiro Murayama², Seiji Samukawa^1,3,7 (WPI-AIMR, Tohoku Univ.¹, Graduate School of IST, Hokakido Univ.², IFS, Tohoku Univ.³, NAIST⁴, RCAST, the Univ. of Tokyo⁵, School of Eng. the Univ. of Tokyo⁶, JST-CREST⁷)

Keywords:バイオテンプレート極限加工