[18p-A8-1~20] 6.2 Carbon-based thin films

[18p-A8-1] [Young Scientist Oral Presentation Award Speech]（15min.）
In situ RHEED Study on Growth Process of Graphene by Low Pressure Chemical Vapor Deposition

^○Takuro Minato¹, Hitoshi Nakahara¹, Koji Asaka¹, Yahachi Saito¹ (Nagoya Univ.¹)

Keywords:グラフェン,RHEED