The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[18p-A8-1~20] 6.2 Carbon-based thin films

Thu. Sep 18, 2014 1:15 PM - 7:00 PM A8 (E207)

2:45 PM - 3:00 PM

[18p-A8-7] Characterization of nitrogen-doped diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

○Masato Tsuchiya1, Kouhei Magara1, Kengo Tokuda1, Hideki Nakazawa1 (Hirosaki Univ.1)

Keywords:diamond-like carbon,nitrogen,chemical vapor deposition