The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[18p-A8-1~20] 6.2 Carbon-based thin films

Thu. Sep 18, 2014 1:15 PM - 7:00 PM A8 (E207)

3:45 PM - 4:00 PM

△ [18p-A8-9] The soft X-ray irradiation effect of Si-containing DLC films

○Ryo Imai1, Tsuneo Suzuki2, Kazuhiro kanda1 (LASTI, Univ. of Hyogo1, Nagaoka Univ. of Tech2)

Keywords:DLC,軟X線