Nitride semiconductor to silicon direct bonding at room temperature

Presentation information

Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

Thu. Sep 18, 2014 1:30 PM - 7:15 PM C5 (Open Hall)

5:30 PM - 5:45 PM

^○Kazuaki Tsuchiyama¹, Hiroyuki Tahara¹, Keisuke Yamane¹, Hiroto Sekiguchi¹, Hiroshi Okada^1,2, Akihiro wakahara¹ (Toyohashi Univ. Tech¹, EIIRIS²)

Keywords:常温接合,窒化物半導体,シリコン