5:30 PM - 5:45 PM
[18p-C5-14] Nitride semiconductor to silicon direct bonding at room temperature
Keywords:常温接合,窒化物半導体,シリコン
Oral presentation
15. Crystal Engineering » 15.4 III-V-group nitride crystals
Thu. Sep 18, 2014 1:30 PM - 7:15 PM C5 (Open Hall)
5:30 PM - 5:45 PM
Keywords:常温接合,窒化物半導体,シリコン