The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[18p-C5-1~19] 15.4 III-V-group nitride crystals

Thu. Sep 18, 2014 1:30 PM - 7:15 PM C5 (Open Hall)

5:30 PM - 5:45 PM

[18p-C5-14] Nitride semiconductor to silicon direct bonding at room temperature

Kazuaki Tsuchiyama1, Hiroyuki Tahara1, Keisuke Yamane1, Hiroto Sekiguchi1, Hiroshi Okada1,2, Akihiro wakahara1 (Toyohashi Univ. Tech1, EIIRIS2)

Keywords:常温接合,窒化物半導体,シリコン