The 75th JSAP Autumn Meeting, 2014

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Oral presentation

03. Optics and Photonics » 3.13 Semiconductor optical devices

[18p-C6-1~17] 3.13 Semiconductor optical devices

Thu. Sep 18, 2014 1:30 PM - 6:00 PM C6 (C212)

2:15 PM - 2:30 PM

[18p-C6-4] Numerical simulation of the AlAs selective oxidation characteristics using intermixing method

○Che Wei1, Tomoyuki Miyamoto1 (Tokyo Tech, P&I Lab1)

Keywords:混晶化,選択酸化,数値解析