The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[18p-PA7-1~16] 6.3 Oxide-based electronics

Thu. Sep 18, 2014 4:00 PM - 6:00 PM PA7 (Gymnasium1)

ポスター掲示時間16:00~18:00(PA7会場)

4:00 PM - 6:00 PM

[18p-PA7-1] Fabrication of NiO-related transparent thin film transistor by RF reactive sputtering

Daisuke Kawade1,2, Ryo Sakai1, Yasuyuki Watanabe2,3, Shigefusa Chichibu4, Mutsumi Sugiyama1,2 (Faculty of Sci. & Tech., Tokyo Univ. of Science1, RIST, Tokyo Univ. of Science2, Faculty of Tech, Tokyo Univ. of Science, Suwa3, IMRAM, Tohoku Univ.4)

Keywords:トランジスタ,薄膜,透明