[18p-PA7-1~16] 6.3 Oxide-based electronics

[18p-PA7-1] Fabrication of NiO-related transparent thin film transistor by RF reactive sputtering

Daisuke Kawade^1,2, ^○Ryo Sakai¹, Yasuyuki Watanabe^2,3, Shigefusa Chichibu⁴, Mutsumi Sugiyama^1,2 (Faculty of Sci. & Tech., Tokyo Univ. of Science¹, RIST, Tokyo Univ. of Science², Faculty of Tech, Tokyo Univ. of Science, Suwa³, IMRAM, Tohoku Univ.⁴)

Keywords:トランジスタ,薄膜,透明