The 75th JSAP Autumn Meeting, 2014

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Poster presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[18p-PA7-1~16] 6.3 Oxide-based electronics

Thu. Sep 18, 2014 4:00 PM - 6:00 PM PA7 (Gymnasium1)

ポスター掲示時間16:00～18:00(PA7会場)

4:00 PM - 6:00 PM

[18p-PA7-2] Investigation of Ga-In-O films grown on α-Al2O3 substrates by mist CVD growth

○Keisuke Tanuma1, Takumi Hatakeyama1, Takeyoshi Onuma1,2, Tomohiro Yamaguchi1, Shigeyuki Kuboya3, Ryuji Katayama3, Takashi Matsuoka3, Tohru Honda1 (Kogakuin Univ.1, Tokyo National College of Technology2, Tohoku Univ.3)

Keywords:ミストCVD