[18p-PA7-1~16] 6.3 Oxide-based electronics

[18p-PA7-4] High Proton Conductivity in Sputtered BaZrY-O Thin Films

^○Takashi Nishihara¹, Yuji Zenitani¹, Tetsuya Asano¹, Hideaki Adachi¹, Akihiro Itou¹, Hiroki Takeuchi¹, Saifullah Badar¹, Hyunjeong Nam¹, Eiji Fujii¹ (Panasonic Corp.¹)

Keywords:プロトン,BZY,薄膜