[18p-PB10-1~11] 15.5 IV-group crystals and IV-IV-group mixed crystals

[18p-PB10-4] Influence of thermal treatment on structural and electrical characteristics of tensile-strained Si/relaxed SiGe/Si(110) heterostructures

^○Naoto Utsuyama¹, Keisuke Arimoto¹, Junji Yamanaka¹, Kiyokazu Nakagawa¹, Noritaka Usami², Kentaro Sawano³ (CCST Univ. of Yamanashi¹, Nagoya Univ², ARL Tokyo City Univ³)

Keywords:半導体,Si