[18p-PB5-1~11] 8.3 Plasma deposition of thin film and surface treatment

[18p-PB5-1] Production of RF ring-shaped hollow discharge magnetized plasma with permanent magnets and its spatial profile for plasma processing

^○Yasunori Ohtsu¹, Toshiaki Yanagise¹, Jyunta Eguchi¹, Yoshiki Yahata¹ (Saga Univ.¹)

Keywords:ホロー放電磁化プラズマ,スパッタ源,酸化亜鉛