[18p-PB5-1~11] 8.3 Plasma deposition of thin film and surface treatment

[18p-PB5-2] Sputtering of the Two Discharge Modes on High-Vacuum Planar Magnetron Sputtering

^○Takahiro Ohno¹, Naokazu Asakura¹, Hirofumi Kawamura¹, Goh Usami¹, Takayoshi Funaki¹, Masatoshi Itoh¹, Yoshio Uhara¹, Tsutomu Miura¹, Shigeru Saito¹ (TUS¹)

Keywords:スパッタ