The 75th JSAP Autumn Meeting, 2014

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Poster presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[18p-PB5-1~11] 8.3 Plasma deposition of thin film and surface treatment

Thu. Sep 18, 2014 1:30 PM - 3:30 PM PB5 (Gymnasium2)

ポスター掲示時間13:30～15:30(PB5会場)

1:30 PM - 3:30 PM

[18p-PB5-10] Influence of Plasma Nitriding in Additional Elements of Various Aluminum Alloys

○Kazato Sakamoto1, Yuichiro Takemura1 (Graduated School, Kinki Univ.1)

Keywords:電子ビーム励起プラズマ,プラズマ窒化,アルミニウム