[18p-PB5-1~11] 8.3 Plasma deposition of thin film and surface treatment

△ [18p-PB5-11] Optimization for Surface Functionalization of the CNT Dot-Array by Using Capillary Atmospheric Pressure Plasma Jet

^○Mitsuru Okada¹, Abuzairi Tomy^2,3, Han Chou¹, Poespawati Nji³, Masaaki Nagatsu^1,2 (Shizuoka Univ.¹, Shizuoka Univ.², Universitas Indonesia.³)

Keywords:プラズマジェット,官能基修飾,CNTドットアレイ