The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[18p-PB5-1~11] 8.3 Plasma deposition of thin film and surface treatment

Thu. Sep 18, 2014 1:30 PM - 3:30 PM PB5 (Gymnasium2)

ポスター掲示時間13:30~15:30(PB5会場)

1:30 PM - 3:30 PM

[18p-PB5-2] Sputtering of the Two Discharge Modes on High-Vacuum Planar Magnetron Sputtering

Takahiro Ohno1, Naokazu Asakura1, Hirofumi Kawamura1, Goh Usami1, Takayoshi Funaki1, Masatoshi Itoh1, Yoshio Uhara1, Tsutomu Miura1, Shigeru Saito1 (TUS1)

Keywords:スパッタ