Improvement of DLC film quality formed by dielectric barrier discharge plasma

Presentation information

Poster presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

Thu. Sep 18, 2014 1:30 PM - 3:30 PM PB5 (Gymnasium2)

ポスター掲示時間13:30～15:30(PB5会場)

1:30 PM - 3:30 PM

^○Kazuya Tada¹, Shinji Yasui¹, Yasutaka Asai¹ (Nagoya Institute Of Technology¹)

Keywords:プラズマCVD