[18p-PB5-1~11] 8.3 Plasma deposition of thin film and surface treatment

[18p-PB5-6] Fabrication of a-TiNx thin films at Low Temperature by Atomic Layer Deposition Technique

^○Keita Seki¹, Byonhaku Yuu¹, Tetuya Satou¹ (Yamanashi Univ.¹)

Keywords:原子層堆積法,マイクロ波プラズマ