[18p-PB6] 8.4 Plasma etching

[18p-PB6-1] Damage Characteristics of AlGaN Surface Etched by CF4 and Ar Plasmas

^○Masahito Niibe¹, Retsuo Kawakami², Yoshitaka Nakano³, Takashi Mukai⁴, Tatsuo Shirahama², Shodai Hirai¹ (Univ. of Hyogo¹, Univ. of Tokushima², Chubu Univ.³, Nichia Corp.⁴)

Keywords:エッチングダメージ,AlGaN,CF4