The 75th JSAP Autumn Meeting, 2014

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Symposium » Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

[18p-S1-1~9] Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

Thu. Sep 18, 2014 1:30 PM - 5:30 PM S1 (S1)

1:30 PM - 1:45 PM

[18p-S1-1] Present Situation and Problems in Plasma Simulations

○Fumiyoshi Tochikubo1 (Tokyo Metropolitan Univ.1)

Keywords:プラズマシミュレーション,反応性プラズマ