[18p-S1-1~9] Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

[18p-S1-2] Fundamental process of gas discharge
-Electron collision cross sections and electron transport coefficients-

^○Kohki Satoh¹ (Muroran I. T.¹)

Keywords:放電基礎過程,電子衝突断面積,電子輸送係数