The 75th JSAP Autumn Meeting, 2014

Presentation information

Symposium

Symposium » Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

[18p-S1-1~9] Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

Thu. Sep 18, 2014 1:30 PM - 5:30 PM S1 (S1)

1:45 PM - 2:15 PM

[18p-S1-2] Fundamental process of gas discharge
-Electron collision cross sections and electron transport coefficients-

Kohki Satoh1 (Muroran I. T.1)

Keywords:放電基礎過程,電子衝突断面積,電子輸送係数