[18p-S1-1~9] Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

[18p-S1-5] Application for Analysis of Discharge Phenomenon on Dielectrics Considering Water Adsorption by Molecular Orbital Analysis

^○Atsushi Ohtake¹, Kinya Kobayashi¹ (Hitachi Ltd.¹)

Keywords:吸湿,放電,分子軌道法