The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Symposium

Symposium » Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

[18p-S1-1~9] Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

Thu. Sep 18, 2014 1:30 PM - 5:30 PM S1 (S1)

4:15 PM - 4:45 PM

[18p-S1-7] Plasma Simulations for Semiconductor Device Manufacturing Equipment

○Kazuki Denpoh1 (Tokyo Electron Yamanashi Ltd.1)

Keywords:semiconductor device manufacturing equipment,simulation,plasma