The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Oral presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[19a-A10-1~10] 6.3 Oxide-based electronics

Fri. Sep 19, 2014 9:15 AM - 11:45 AM A10 (E214)

9:15 AM - 9:30 AM

[19a-A10-1] Low-temperature treatment of ITO using high-pressure unsaturated steam

○Sota Hirahara1, Hirotsugu Kitamura1, Yusuke Uetake1, Toshikatsu Nagasawa2, Kei Igarashi2, Kazuhiro Ohkawa1 (Tokyo Univ. of Sci.1, Hirayama Mfg. Co.2)

Keywords:酸化インジウムスズ