10:30 AM - 10:45 AM
[19a-A15-5] Ab initio analysis on the stability of metal atoms in silicon oxide and silicon nitride.
Keywords:Si酸化膜,Si窒化膜,第一原理計算
Presentation information
Oral presentation
13. Semiconductors A (Silicon) » 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation
[19a-A15-1~9] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation
Fri. Sep 19, 2014 9:30 AM - 12:00 PM A15 (E306)