[19a-A16-1~10] 15.5 IV-group crystals and IV-IV-group mixed crystals

△ [19a-A16-2] Observation of Anisotropic Biaxial Stress Relaxation in Mesa-Structure of High Ge Concentration Strained-SiGe by Exciting TO/LO Phonons Spectra with Oil-Immersion Raman Spectroscopy

^○Shotaro Yamamoto¹, Daisuke Kosemura¹, Motohiro Tomita^1,3, Kazuma Takeuchi¹, Ryo Yokogawa¹, Koji Usuda², Atsushi Ogura¹ (Meiji Univ.¹, AIST-GNC², JSPS Research Fellow DC³)

Keywords:SiGe,歪,応力緩和