The 75th JSAP Autumn Meeting, 2014

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13. Semiconductors A (Silicon) » 13.2 Insulator technology

[19a-A17-1~12] 13.2 Insulator technology

Fri. Sep 19, 2014 9:00 AM - 12:30 PM A17 (E308)

11:45 AM - 12:00 PM

[19a-A17-10] Fabrication and Evaluation of SiO2/Si Structures by Kr/O2 Plasma Oxidation at Low Temperature

○Yuta Fujikawa1, Tomo Ueno1, Yoshitaka Iwazaki1 (Tokyo Univ. of Agri. & Tech.1)

Keywords:Kr,SiO2