The 75th JSAP Autumn Meeting, 2014

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13. Semiconductors A (Silicon) » 13.2 Insulator technology

[19a-A17-1~12] 13.2 Insulator technology

Fri. Sep 19, 2014 9:00 AM - 12:30 PM A17 (E308)

12:15 PM - 12:30 PM

▲ [19a-A17-12] Improvement of S-factor method for evaluation of MOS interface state density

○(D)Weili Cai1,2, Mitsuru Takenaka1,2, Shinichi Takagi1,2 (Tokyo Univ.1, JST CREST2)

Keywords:S factor method, interface state density