Evaluation of Dielectric Constant that Deduced from Relaxation Energy at SiO<sub>2</Sub>/Si interfaces

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.2 Insulator technology

Fri. Sep 19, 2014 9:00 AM - 12:30 PM A17 (E308)

11:00 AM - 11:15 AM

^○Maho Moriya^1,3, Yuji Amano^2,3, Daisuke Kobayashi³, Tomoyuki Yamamoto¹, Kazuyuki Hirose³ (Waseda Univ.¹, Tokyo City Univ.², ISAS/JAXA³)

Keywords:誘電率,緩和エネルギー,X線光電子分光法