[19a-A19-1~13] 13.3 Si Process・Interconnect・MEMS・Integration

[19a-A19-8] Electrical Characterization of TFT Using Crystallized Germanium Film by Atmospheric Pressure Micro-Thermal-Plasma-Jet Irradiation

^○Taichi Nakatani¹, Shohei Hayashi¹, Seiji Morisaki¹, Takahiro Kamikura¹, Shogo Yamamoto¹, Seiichiro Higashi¹ (Hiroshima Univ.¹)

Keywords:熱プラズマジェット,ゲルマニウム,薄膜トランジスタ