[19a-PB1-1~23] 6.2 Carbon-based thin films

[19a-PB1-17] Surface roughness evaluation of (100) diamond by wet anneal treatment

^○Daisuke Miyata¹, Takuma Minamiyama¹, Norio Tokuda^1,2,3, Daisuke Takeuchi^2,3, Satoshi Yamasaki^2,3, Takao Inokuma¹ (Grad. School of Natural Sci. & Tech. Kanazawa Univ.¹, AIST², JST, CREST³)

Keywords:ダイヤモンド,ウェットアニール,表面ラフネス