The 75th JSAP Autumn Meeting, 2014

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Poster presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[19a-PB1-1~23] 6.2 Carbon-based thin films

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB1 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB1会場)

9:30 AM - 11:30 AM

[19a-PB1-8] Analysis of dissociative excitation reaction of hexamethyldisilane in microwave discharge flow of Ar.

○(M1)Saeki Syunsuke1, Haruhiko Itou1 (Nagaoka Univ. of Tech.1)

Keywords:ヘキサメチルジシラン,反応解析,プラズマCVD