Rapid Growth of SiC Films on Si Substrates Covered with Natural Oxide Using Monomethylsilane

Presentation information

Poster presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB5 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB5会場)

9:30 AM - 11:30 AM

^○Yuzuru Narita¹, Shinpei Yamada¹, Masanobu Takano¹, Takafumi Hayao¹, Kensuke Nakajima¹, Maki Suemitsu² (Yamagata Univ.¹, RIEC, Tohoku Univ.²)

Keywords:立方晶炭化ケイ素