Crystalline Evaluation of Phosphorus-implanted 4H-SiC Layer by Color Definition of EBSD Pattern

Presentation information

Poster presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB5 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB5会場)

9:30 AM - 11:30 AM

^○Hiroaki Hanafusa¹, Keisuke Maruyama¹, Shohei Hayashi¹, Seiichiro Higashi¹ (Hiroshima Univ.¹)

Keywords:SiC,EBSD,結晶性