The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[19p-A10-1~22] 6.3 Oxide-based electronics

Fri. Sep 19, 2014 1:15 PM - 7:00 PM A10 (E214)

6:45 PM - 7:00 PM

[19p-A10-22] Selective growth of Wadsley phase V6O13 and VO2(B) thin films on metal and Si substrate

BintiAzhan NurulHanis1, Kunio Okimura1 (Tokai Univ.1)

Keywords:ニ酸化バナジウム,反応性スパッタ法,ポストあにーる