The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.1 X-ray technologies

[19p-A13-1~14] 7.1 X-ray technologies

Fri. Sep 19, 2014 1:15 PM - 5:00 PM A13 (E304)

2:45 PM - 3:00 PM

△ [19p-A13-7] Efficient generation of EUV light from CO2 laser driven Sn plasma

○(PC)Hiraku Matsukuma1, Kensuke Yoshida1, Tatsuya Hosoda1, Shinsuke Fujioka1, Akifumi Yogo1, Hiroaki Nishimura1, Eiji Sato2, Toshihiro Somekawa3, Tatsuya Yanagida4 (Osaka Univ.1, NAT2, ILT3, Giga Photon inc.4)

Keywords:EUV光源