The 75th JSAP Autumn Meeting, 2014

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Oral presentation

13. Semiconductors A (Silicon) » 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

[19p-A15-1~12] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

Fri. Sep 19, 2014 1:30 PM - 4:45 PM A15 (E306)

1:30 PM - 1:45 PM

[19p-A15-1] The Thickness dependence of Ultraviolet Raman Spectra in Extremely Thin Strained SOI

○Tetsuya Tada1, Mikiya Hara1, Vladimir Poborchii1 (AIST1)

Keywords:ラマン,歪みSOI,弾性係数