The 75th JSAP Autumn Meeting, 2014

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13. Semiconductors A (Silicon) » 13.2 Insulator technology

[19p-A17-1~11] 13.2 Insulator technology

Fri. Sep 19, 2014 2:00 PM - 5:00 PM A17 (E308)

2:15 PM - 2:30 PM

△ [19p-A17-2] Study of the Al2O3/GaSb MOS structures with N2 plasma treatment

○(M2)Takahiro Gotow1,2, Sachie Fujikawa1, Hiroki I. Fujishiro1, Mutsuo Ogura2, Tetsuji Yasuda2, Tatsuro Maeda1,2 (TUS1, AIST2)

Keywords:GaSb,MOS,窒化