[19p-A17-1~11] 13.2 Insulator technology

△ [19p-A17-4] Effects of thermal treatment on the electrical properties of ALD-grown Al₂O₃/GeO₂/p-Ge

^○Kosei Yanachi¹, Tomoya Yokohira¹, Daichi Yamada¹, Yohei Otani¹, Keita Seki², Tetsuya Sato², Yukio Fukuda¹ (Tokyo Univ. of Science, Suwa¹, Univ. of Yamanashi²)

Keywords:熱処理