[19p-A19-1~15] 13.3 Si Process・Interconnect・MEMS・Integration

[19p-A19-8] Investigation on passivation for multilayer graphene interconnects wth Br intercation

^○Yuji Matsumoto¹, Akihiko Aozasa¹, Ryosuke Kosugi¹, Hisao Miyazaki², Makoto Wada², Naoshi Sakuma², Akihiro Kajita², Tadashi Sakai², Kazuyoshi Ueno¹ (SIT¹, LEAP²)

Keywords:グラフェン