The 75th JSAP Autumn Meeting, 2014

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Oral presentation

01. Applied Physics in General » 1.7 Instrumentation and measurement and Metrology

[19p-A24-1~13] 1.7 Instrumentation and measurement and Metrology

Fri. Sep 19, 2014 2:00 PM - 5:30 PM A24 (E317)

4:30 PM - 4:45 PM

[19p-A24-10] Development of the sapphire-based capacitance diaphragm gauge for the Atomic Layer Deposition

○Takuya Ishihara1, Hidenobu Tochigi1, Junichi Yoshinaga1, Yasuhide Yoshikawa1 (Azbil Corp.1)

Keywords:隔膜式真空計,原子層堆積,耐デポ